Volume 4,
Number 1,
March 2003
Volume 4,
Number 2,
June 2003
Special Issue on Microelectromechanical Systems (ICMAT 2003:
Symposium G),
Part 1
- Robin H. Liu, Jianing Yang, Ralf Lenigk, Justin Bonanno, Frederic Zenhausern, Piotr Grodzinski:
Fully Integrated Microfluidic Biochips For Dna Analysis.
145-150
Electronic Edition (link) BibTeX
- Thomas Gessner, Andreas Bertz, Christian Lohmann, Steffen Kurth, Karla Hiller:
Advanced Silicon Micromachining.
151
Electronic Edition (link) BibTeX
- J. G. E. Gardeniers, A. Van Den Berg:
Lab-On-A-Chip Systems For Biomedical And Environmental Monitoring.
157-162
Electronic Edition (link) BibTeX
- Paul Muralt:
Piezoelectric Micromachined Ultrasonic Transducers For Rf Filtering And Ultrasonic Imaging.
163-168
Electronic Edition (link) BibTeX
- Taher Saif, Aman Haque:
Mechanical Behavior Of Nano Scale Thin Films Using Mems Sensors.
169-173
Electronic Edition (link) BibTeX
- Volker Saile:
Fabrication Of Polymer Microsystems.
175-180
Electronic Edition (link) BibTeX
- Dong-Il Cho, Byoung-Doo Choi, Sangwoo Lee, Seung Joon Paik, Sangjun Park, Jaehong Park, Yonghwa Park, Jongpal Kim, Il-Woo Jung:
Dry And Wet Etching With (111) Silicon For High-Performance Micro And Nano Systems.
181-187
Electronic Edition (link) BibTeX
- Arun Majumdar:
Mems As A Platform For Nanoexploration And Nanointegration.
189-194
Electronic Edition (link) BibTeX
- Minhang Bao, Yuancheng Sun, Yiping Huang, Yuelin Wang:
Safe Operation Conditions Of Capacitive Inertial Sensor For Dynamic Signals.
195-200
Electronic Edition (link) BibTeX
Actuators and Sensors
- W. T. Lin, J. C. Chiou:
Multi-Directional Dual Comb-Drive Actuator For Optical Applications.
201-204
Electronic Edition (link) BibTeX
- Yuan Xu, Christina Yuan Ling Tan, Wen Ping Wang, Francis Eng Hock Tay:
Simulation Of Large Membrane Deformation In An Electrochemical Actuator.
205-210
Electronic Edition (link) BibTeX
- Y. Lu, J. P. Yang, N. B. Chong:
A Novel Design Of R/W Head Positioning Microactuator In Hard Disc Drives.
211-214
Electronic Edition (link) BibTeX
- Ajay Agarwal, Terence Gan, Janak Singh, Yue K. Hoh, Andrew A. O. Tay:
Study On Bimorph And Multimorph Microactuators.
215-219
Electronic Edition (link) BibTeX
- Yongqing Fu, Hejun Du, Weimin Huang, Min Hu:
Tini Film Based Shape Memory Alloy And Microactuators.
221-225
Electronic Edition (link) BibTeX
- Bangtao Chen, Jianmin Miao, Hong Zhu:
Analysis And Comparison Of Flexure Structures Used In 3-D Electrostatic Microactuators For Hard Disk Drives.
227-230
Electronic Edition (link) BibTeX
BioMEMS and Microfluids
- Yubo Miao, Yu Chen, Quanbo Zou, Janak Singh, Tie Yan, Chew-Kiat Heng, Tit Meng Lim:
Low Cost Micro-Pcr Array And Micro-Fluidic Integration On Single Silicon Chip.
231-234
Electronic Edition (link) BibTeX
- Yubo Miao, Chong Ser Chong, Taichong Chai, Yu Chen, Quanbo Zou, Tie Yan, Chew-Kiat Heng, Tit Meng Lim:
Flip-Chip Packaged Micro-Plate For Low Cost Thermal Multiplexing.
235-238
Electronic Edition (link) BibTeX
- Yiping Huang, Jilie Kong, Jia Zhou, Yingcai Long, Po Li, Haifen Xie, Minhang Bao:
Zeolite And Polymer Film Bio-Chemical Mems Sensors.
239-242
Electronic Edition (link) BibTeX
- K. T. Ooi, C. Yang, C. K. Chai, T. N. Wong, P. H. Ang:
Effects Of Electric Double Layer And Viscous Dissipation In Microcapillary.
243-248
Electronic Edition (link) BibTeX
- Thai-Quang Truong, Xiao-Yang Huang, Nam-Trung Nguyen:
Polymeric Stack-Assembled Micropump With SU-8 Check Valves.
249-252
Electronic Edition (link) BibTeX
- Guolin Xu, Dor Ngi Ting, Vincent Luar, Lin Kiat Saw:
A Disposable Self-Priming And Bubble Tolerance Pneumatic Actuation Micro-Pump.
253-256
Electronic Edition (link) BibTeX
- Michael J. SchöNing, Arshak Poghossian, Joachim W. Schultze:
Measuring Seven Parameters By Two Isfet-Modules In A Microcell Set-Up.
257-260
Electronic Edition (link) BibTeX
- Yuejun Kang, Chun Yang, Xiaoyang Huang:
Modelling Of The Capillary Electrochromatography With Application In Biomems.
261-264
Electronic Edition (link) BibTeX
- E. Y. K. Ng, N. Y. Liu, C. H. Ang:
A Multi-Coefficient Slip Model For Ultra-Thin Gas Film Lubrication.
265-268
Electronic Edition (link) BibTeX
- Zhigang Wu, Thai-Quang Truong, Nam-Trung Nguyen, Xiao-Yang Huang:
Characterization Of Microfluidic Devices Using Micro Particle Image Velocimetry.
269-272
Electronic Edition (link) BibTeX
- C. Yang, T. N. Wong, Y. L. Leu, K. T. Ooi, J. C. Chai:
Characterization Of Electroosmotic Flow In Microchannels.
273-276
Electronic Edition (link) BibTeX
- Guolin Xu, Francis Eng Hock Tay, Yuanzhi Lao, Ciprian Iliescu, Yuan Hong Yu, Vincent Luar, Diana Hartono, Y. Y. Lee:
A Dielectrophoresis-Based Bio-Sample Preparation.
277-280
Electronic Edition (link) BibTeX
- Han Zhang, Franck Chollet, Etienne Burdet, Aun Neow Poo, Dietmar Werner Hutmacher:
Fabrication Of 3-D Microparts For The Assembly Of Scaffold/Cell Constructs In Tissue Engineering.
281-284
Electronic Edition (link) BibTeX
- Qinghui Wang, Yin Tan, Haiqing Gong:
An Integrated System For Real-Time Pcr Analysis Based On Microfluidic Biochip.
285-288
Electronic Edition (link) BibTeX
- Kwong-Luck Tan, Francis Eng Hock Tay:
Memswear - Incorporating Mems Technology Into Smart Shirt For Geriatric Healthcare.
289-292
Electronic Edition (link) BibTeX
- Yeow-Sheong Wong, Francis Eng Hock Tay, Kwong-Luck Tan:
Memswear Fall Sensing System For The Elderly: Design Of A Threshold Accelerometer For Impact Sensing.
293-296
Electronic Edition (link) BibTeX
Silicon Micromachining
- Ranganathan Nagarajan, Ajay Agarwal:
Laterally Isolated Polysilicon Beam Process.
297-301
Electronic Edition (link) BibTeX
- Q. X. Zhang, Q. Y. Guo, J. Li, A. Q. Liu:
Investigation Of Loading Effect In Deep Trench Lisa Technology.
303-306
Electronic Edition (link) BibTeX
- Xiao Lin Zhang, Janak Singh, Ajay Agarwal, Q. X. Zhang:
A New Process For Fabricating Convex Corners In Silicon.
307-310
Electronic Edition (link) BibTeX
- Ajay Agarwal, Xiao Lin Zhang, Terence Gan, Janak Singh:
Thin Silicon Structures Fabrication By Wet Anisotropic Etching.
311-314
Electronic Edition (link) BibTeX
- M. Tang, Ajay Agarwal, Q. X. Zhang, A. Q. Liu:
An Approach Of Shadow Mask For Deep-Holes Patterning.
315-318
Electronic Edition (link) BibTeX
- Tietun Sun, Jianmin Miao, Hong Zhu, Ciprian Iliescu, Jianbo Sun:
Study On Feature Of Silicon Microtrenches With A Multiplexed Inductively Coupled Plasma Etcher.
319-322
Electronic Edition (link) BibTeX
- Wenjiang Zeng, Huamao Lin, Xiaolin Zhang, Ramasamy Chockalingam, Wee Chong Heng, Sangki Hong, Narayanan Balasubramanian:
Effects Of Wafer Bonding And Thinning Processes On Electrical Performance Of Mos Devices.
323-326
Electronic Edition (link) BibTeX
- Jaehong Park, Kidong Park, Seung Joon Paik, Kyo-In Koo, Byoung-Doo Choi, Jongpal Kim, Sangjun Park, Il-Woo Jung, Hyoungho Ko, Dong-Il Cho:
Extremely Sharp {111}-Bound, Single-Crystalline Silicon Nano Tips.
327-330
Electronic Edition (link) BibTeX
Packaging
- Jun Wei, F. L. Ng, M. L. Nai, H. Xie, Peck Cheng Lim, C. K. Wong:
Wafer Bonding Process Based On The Taguchi Analysis.
331-334
Electronic Edition (link) BibTeX
- Yufeng Jin, Jun Wei, Peck Cheng Lim, Zhenfeng Wang:
Hermetic Packaging Of Mems With Thick Electrodes By Silicon-Glass Anodic Bonding.
335-338
Electronic Edition (link) BibTeX
- Zhenfeng Wang, G. J. Qi, Jun Wei, Peck Cheng Lim, Yufeng Jin, C. K. Wong:
A Novel Wafer-Level Packaging Solution For Mems.
339-342
Electronic Edition (link) BibTeX
- Ciprian Iliescu, Jianmin Miao, Marioara Avram:
Fabrication Of Chip Scale Piezoresistive Pressure Sensors Using Screen-Printed Glass Frit Packaging.
343-346
Electronic Edition (link) BibTeX
- Tong Yan Tee, Giovanni Frezza, Mayhuan Lim, Hun Shen Ng, Federico Ziglioli, Zhaowei Zhong:
Design For Board Level Reliability Of A Miniaturized Mems Package: Stacked Die Tqfn.
347-350
Electronic Edition (link) BibTeX
- W. B. Yu, Jun Wei, C. M. Tan, S. S. Deng, M. L. Nai:
Influence Of Applied Load On Wafer Bonding In Vacuum.
351-354
Electronic Edition (link) BibTeX
- C. T. Wee, Y. Lu, J. P. Yang:
Investigation Of Si-Altic Wafer Bonding Using SU-8.
355-358
Electronic Edition (link) BibTeX
- Andreas H. Foitzik, Mechtilde Schäfer, Wolfgang Kaese:
High Resolution Microchemical Analysis Of Interfaces In Wire Bonds.
359-362
Electronic Edition (link) BibTeX
Wireless MEMS/RF MEMS
- Jianbo Sun, Jianmin Miao, Tietun Sun, Hong Zhu:
Development And Comparison Of Micromachined Inductors For Rf Applications.
363-367
Electronic Edition (link) BibTeX
- M. Tang, Ajay Agarwal, P. Win, Q. X. Zhang, J. Li, A. Q. Liu:
A New Lateral Rf Switch Using Soi-Deep-Etching Fabrication Process.
369-372
Electronic Edition (link) BibTeX
- Xue-Jie Zhang, Z. X. Shen, A. Q. Liu:
Mems-Switch-Based Reconfigurable Antenna.
373-376
Electronic Edition (link) BibTeX
- A. B. Yu, Q. X. Zhang, A. Q. Liu:
Design Of A Novel Microwave Mems Tunable Filter.
377-380
Electronic Edition (link) BibTeX
- P. Win, A. Q. Liu:
A Novel Soi Micromachined Relay For True-Time-Delay Systems Applications.
381-384
Electronic Edition (link) BibTeX
Design,
Modelling and Simulation
- F. Bennini, J. Mehner, W. Dötzel:
System Level Simulations Of Mems Based On Reduced Order Finite Element Models.
385-388
Electronic Edition (link) BibTeX
- S. T. Tan, E. Y. K. Ng:
Numerical Studies Of Developing Flow In Microchannel.
389-392
Electronic Edition (link) BibTeX
- M. Shamshirsaz, M. Bahrami, M. Tayefeh:
Finite Element Analysis Of Time-Dependent Buckling Of Polysilicon Micro Beams With Temperature-Dependent Properties.
393-396
Electronic Edition (link) BibTeX
- Nisarga N. Naik, Ashish A. Ghangrekar, Sameer U. Kalghatgi, Smitha S. Shetty, Prakash R. Apte:
Electrical And Heat Flow Simulation Of Mems Structures Using Spice.
397-400
Electronic Edition (link) BibTeX
- Andojo Ongkodjojo, Francis Eng Hock Tay:
Slide Film Damping And Squeeze Film Damping Models Considering Gas Rarefaction Effects For Mems Devices.
401-404
Electronic Edition (link) BibTeX
- M. B. Liu, G. R. Liu, K. Y. Lam:
Computer Simulation Of Flip-Chip Underfill Encapsulation Process Using Meshfree Particle Method.
405-408
Electronic Edition (link) BibTeX
- W. J. Wang, R. M. Lin, T. T. Sun, D. G. Guo:
A Novel Mems Fabry-Perot Microcavity Structure For Pressure Sensing Application.
409-412
Electronic Edition (link) BibTeX
- Xiaochong Deng, Jiaping Yang, Tow Chong Chong:
Design And Modeling Of Thermally Actuated Micromirror For Fine-Tracking Mechanism Of High-Density Optical Data Storage.
413-416
Electronic Edition (link) BibTeX
- J. C. Chiou, Y. J. Lin:
A Novel Application Of Contact Friction For Laterally Motion Tunable Acceleration-Threshold Switch: Modeling And Simulation.
417-420
Electronic Edition (link) BibTeX
- X. Y. Chen, C. Yang, K. C. Toh, J. C. Chai:
Numerical Analysis Of The Edl Effect On Liquid Flow In Microchannels.
421-424
Electronic Edition (link) BibTeX
- W. Z. Li, B. C. Khoo, D. Xu:
Near-Wall Hot-Wire Correction Based On Y+ AND H0.
425-430
Electronic Edition (link) BibTeX
- W. Z. Li, J. M. Xue, Z. H. Zhou, J. Wang, Hong Zhu, Jianmin Miao, S. J. O'Shea:
Design Issues Of Multilayer Piezoelectric Biosensors.
431-434
Electronic Edition (link) BibTeX
Volume 4,
Number 3,
September 2003
Optical MEMS
- Y. C. Lin, J. C. Chiou, C. L. Chen:
A Digital/Analog Electrostatic Actuating Mechanism For Optical Applications.
435-438
Electronic Edition (link) BibTeX
- H. Cai, C. W. Chan, K. V. Ling, C. Lu, Y. X. Wang, A. Q. Liu:
A Study Of Closed-Loop Control Of Optical MEMS Device.
439-442
Electronic Edition (link) BibTeX
- Franck Chollet, Chun Hong Low, Sok Kim Lee, Chun Yang:
Fabrication Of Concave And Convex Micro-Optical Elements With Polymer For Free-Space Micro-Optical Bench.
443-446
Electronic Edition (link) BibTeX
- H. B. Liu, Franck Chollet:
Optical Switch Based On Moving Polymer Waveguides And Self-Latching Structure.
447-450
Electronic Edition (link) BibTeX
- J. Li, J. B. Zhang, X. M. Zhang, C. Lu, Q. X. Zhang:
Instructions Micromachined Tunable Filter Via Actuation Of Fabry-Parot Cavity.
451-454
Electronic Edition (link) BibTeX
- A. Q. Liu, X. M. Zhang, J. Li, D. Y. Tang:
Characteristics Of Micromachined Short-External-Cavity Tunable Lasers.
455-459
Electronic Edition (link) BibTeX
- S. H. Wang, C. Quan, C. J. Tay, I. Reading, Z. P. Fang:
Characterization Of The Deformation Of Micro-Components Using Optical Interferometry.
461-465
Electronic Edition (link) BibTeX
Testing and Characterisation
- Andreas H. Foitzik, Wolfgang Kaese, Thomas Vogt, Michael Sommerer, Serguei Arkhipov:
Static And Dynamic Characterization Of Mems Via ESPI.
467-470
Electronic Edition (link) BibTeX
- Jacek Baborowski, Nicolas Ledermann, Paul Muralt, Daniel Schmitt:
Simulation And Characterization Of Piezoelectric Micromachined Ultrasonic Transducers (pMUTs) Based On Pzt/Soi Membranes.
471-475
Electronic Edition (link) BibTeX
- Ashok K. Pandey, R. Pratap:
Studies In Nonlinear Effects Of Squeeze Film Damping In Mems Structures.
477-480
Electronic Edition (link) BibTeX
- W. M. Yang, S. K. Chou, C. Shu, Z. W. Li, H. Xue:
Power Generation At The Micro Scale.
481-484
Electronic Edition (link) BibTeX
- K. N. Bhat, B. R. K. Reddy, V. Vinoth Kumar, K. Siva Kumar, Y. Sushma, N. Ramesh Babu, K. Natarajan:
Design Optimization, Fabrication And Testing Of A Capacitive Silicon Accelerometer Using An Soi Approach.
485-488
Electronic Edition (link) BibTeX
- Prem Pal, Suneet Tuli, Sudhir Chandra:
Design And Fabrication Of SIO2 Micromechanical Structures Inside Anisotropically Etched Cavity.
489-492
Electronic Edition (link) BibTeX
Fabrication Process/Fabrication Technique
- Dongil Cho, Hyoungho Ko, Jongpal Kim, Sangjun Park, Donghun Kwak, Taeyong Song, William Carr, James Bus:
A Novel Z-Axis Accelerometer With Perfectly-Aligned, Fully-Offset Vertical Combs Fabricated Using The Extended Sacrificial Bulk Micromachining Process.
493-496
Electronic Edition (link) BibTeX
- Andrew B. Randles, Brett J. Pokines, Shuji Tanaka, Masayoshi Esashi:
Deep Structures Wet Etched Into Lithium Niobate Using A Physical Mask.
497-500
Electronic Edition (link) BibTeX
- Jianxia Gao, Mary B. Chan-Park, Dongzhu Xie, Bryan K. A. Ngoi, Chee Yoon Yue:
Sub-Micron Patterning Titanium Nitride By Focused Ion-Beam Technique.
501-504
Electronic Edition (link) BibTeX
- V. Pradeep Kumar, S. Karmalkar:
Study Of Electroless Nickel On Polished Silicon For Mems Applications.
505-508
Electronic Edition (link) BibTeX
- Hong Zhu, Jianmin Miao, Bangtao Chen, Zhihong Wang, Weiguan Zhu:
Micromachining Process Of Piezoelectric Microcantilever Using Pzt Thin Film.
509-512
Electronic Edition (link) BibTeX
- X. B. Zeng, J. F. Li, X. W. Sun, G. J. Qi, X. T. Zeng:
Polycrystalline Silicon Thin Film Obtained By Aluminum Induced Crystallization.
513-516
Electronic Edition (link) BibTeX
- K. L. Zhang, S. K. Chou, Simon S. Ang, X. S. Tang, J. S. Phang:
Investigation Of Solid Propellant Microthrusters.
517-520
Electronic Edition (link) BibTeX
Materials
- Sudhir Chandra, Vivekanand Bhatt, Shrawan K. Jha:
Sputtered Silicon Dioxide Films For Mems Application.
521-524
Electronic Edition (link) BibTeX
- Gregor Wiche, Jost Goettert, Yujun Song, Josef Hormes, Challa S. S. R. Kumar:
Functional Micro Devices Using 'Nanoparticle-Photoresist' Composites.
525-528
Electronic Edition (link) BibTeX
- Zhong-Geng Ling, Kun Lian, Jian Zhang:
Characterization And Application Of Pag Diluted SU-8.
529-532
Electronic Edition (link) BibTeX
- Kun Lian, J. C. Jiang, S. Wen, C. G. Liu, Zhong-Geng Ling:
Thermal Stability And Resulting Surface Mechanical Properties Of Electroplated Nanocrystalline Ni-Based Mems Material.
533-536
Electronic Edition (link) BibTeX
- Shuhui Yu, Kui Yao, Francis Eng Hock Tay:
(100)-Oriented PZN-xpt Thin Films Grown On Lanio3 Seeding Layers.
537-541
Electronic Edition (link) BibTeX
- Tibor Lalinsky, M. Krnac, S. Hascik, Z. Mozolova, L. Matay, I. Kostic, P. Hrkut, Jiri Jakovenko, Miroslav Husak:
Micromechanical Thermal Converter Device Based On Polyimide-Fixed Island Structure.
543-546
Electronic Edition (link) BibTeX
- Ning Jiang, Rajnish K. Sharma, Hanhua Feng, Zhe Wang, Xiaowei Wang:
Impact Of Deposition Parameters On The Characterizations Of Highly Orientated Aluminum Nitride For Film Bulk Acoustic Resonator Device.
547-550
Electronic Edition (link) BibTeX
- Jian-Jun Yuan, Shi-Yuan Cheng, Lei Jiang, Lin-Xian Feng, Zhi-Qiang Fan:
Nanostructured Aggregates From The Self-Assembly Of Bab Triblock Copolymers With A Hydrophilic Middle Block A In Water.
551-554
Electronic Edition (link) BibTeX
- C. Venkatesh, Shashidhar Pati, Navakanta Bhat:
Torsional Mems Varactor With Low Actuation Voltage.
555-558
Electronic Edition (link) BibTeX
Poster Papers
- Ching Lian Chua, Franck Chollet, Jie He:
Study Of A Biological Actuator And Sensor: The Mimosa Pudica.
559-562
Electronic Edition (link) BibTeX
- F. Calame, J. Baborowski, N. Ledermann, P. Muralt:
Local Growth Of SOL-GEL Films By Means Of Microhotplates.
563-568
Electronic Edition (link) BibTeX
- J.-M. Huang, A. Q. Liu, X. M. Zhang, J. Ahn:
A Novel Lumped Two Degrees Of Freedom Pull-In Approach To Electrostatic Torsional Micromirrors.
569-572
Electronic Edition (link) BibTeX
- J.-M. Huang, A. Q. Liu:
Tunable Microelectromechanical Capacitor With Wide Tuning Ranges.
573-576
Electronic Edition (link) BibTeX
- J. Li, Q. X. Zhang, A. Q. Liu:
Prevent Notching For Soi Microstructure Fabrication Using SIO2 Thin Film Technique.
577-580
Electronic Edition (link) BibTeX
- Liujiang Yu, B. K. Tay, D. Sheeja, Y. Q. Fu, Jianmin Miao:
Fabrication Of Amorphous Carbon Micro-Membranes By Deep Reactive Ion Etching Technique.
581-584
Electronic Edition (link) BibTeX
- Jong Ren Kong, Oliver Wilhelmi, Herbert O. Moser:
Gap Optimisation For Proximity X-Ray Lithography Using The Super-Resolution Process.
585-588
Electronic Edition (link) BibTeX
- Il-Woo Jung, Jaehong Park, Byoung-Doo Choi, Jongpal Kim, Sangjun Park, Seung Joon Paik, Dong-Il Cho:
New Vertical Array Actuators Using Extended Sbm And Deep Pn Junction Isolation.
589-592
Electronic Edition (link) BibTeX
- Guangya Zhou, Francis Eng Hock Tay, Chau Fook Siong:
Modeling Of A Two-Axis Torsional Micromirror Using Ahdl.
593-596
Electronic Edition (link) BibTeX
- Mechtilde Schäfer, Matthias Walz, Reiner Stein, Lars Vollmer, Günther Schuster, Andreas H. Foitzik:
The Goeppingen Genereactor For Dna-Analysis.
597-600
Electronic Edition (link) BibTeX
- Mechtilde Schäfer, R. Starzmann, Andreas H. Foitzik:
Chemical Microreactors For In-Situ Online Process Monitoring.
601-604
Electronic Edition (link) BibTeX
- Andreas H. Foitzik, Mechtilde Schäfer, Reiner Stein, Lars Vollmer, Günther Schuster:
Three Dimensional Reference Structures For Confocal Microscopy.
605-608
Electronic Edition (link) BibTeX
- Matthias Küchler, Thomas Otto, Thomas Gessner, Frank Ebling, Henning Schröder:
Hot Embossing For Mems Using Silicon Tools.
609-612
Electronic Edition (link) BibTeX
- Woei-Wan Tan, Pei Ge, Francis Eng Hock Tay, Ai-Poh Loh:
Development Of A 3-Plates Capacitive Pressure Sensor.
613-616
Electronic Edition (link) BibTeX
- Y. Murakoshi, X. C. Shan, Ryutaro Maeda:
Application Of Micro Hot Embossing For MEMS Structures.
617-620
Electronic Edition (link) BibTeX
- H. Liu, Stephen Y. M. Wan, G. C. Lim, Andrew A. O. Tay:
The Development Of A Polymer Based Piezo-Actuated Micropump.
621-625
Electronic Edition (link) BibTeX
- Rakesh P. Dhote, Sudhir S. Chiluveru, Saurabh A. Chandorkar, Prakash R. Apte:
A Novel Heatuator.
627-630
Electronic Edition (link) BibTeX
- Wei Zhang, Xi Yao, Xiaoqing Wu:
Novel Preparation Scheme Of Monolithic Pyroelectric Thin Film Infrared Sensor.
631-636
Electronic Edition (link) BibTeX
- Wei Zhang, Xi Yao, Xiaoqing Wu:
Two-Dimensional Thermal Analysis Of Multi-Layer Thin Film Pyroelectric Infrared Detectors.
637-640
Electronic Edition (link) BibTeX
- J. C. Chiou, Y. J. Lin:
A New Modeling Method Of Vertical Electrostatic Comb Drive.
641-644
Electronic Edition (link) BibTeX
- A. L. Palaniappan, J. Zhang, Xiaodi Su, Francis Eng Hock Tay:
Electrical Impedance And Energy Dissipation Analyses Of Quartz Crystal Microbalance For Polymer Coating.
645-649
Electronic Edition (link) BibTeX
- Yuanzhi Lao, Francis Eng Hock Tay, Guolin Xu, Diana Hartono, Y. Y. Lee:
A Non-Contact Micro Thermocycling Chip For Polymerase Chain Reactions.
651-654
Electronic Edition (link) BibTeX
- S. S. Deng, Jun Wei, C. M. Tan, M. L. Nai, W. B. Yu, H. Xie:
Low Temperature Silicon Wafer Bonding By Sol-Gel Processing.
655-658
Electronic Edition (link) BibTeX
- Vijay K. Srivastava, Ratnamala Chatterjee, T. C. Goel:
Structural And Magnetic Property Of Aged Ni2mnal Heusler Alloys.
659-662
Electronic Edition (link) BibTeX
- Yee Ting Wong, M. Manimaran, Francis Eng Hock Tay:
Synthesis And Characterisation Of Alkanethiolated Nanogold Clusters For Biomems Applications.
663-666
Electronic Edition (link) BibTeX
- Thai-Quang Truong, Nam-Trung Nguyen:
SU-8 On Pmma - A New Technology For Microfluidics.
667-670
Electronic Edition (link) BibTeX
- D. Sheeja, B. K. Tay, L. J. Yu, Jianmin Miao, Y. Q. Fu, D. H. C. Chua, W. I. Milne:
Fabrication Of Smooth Diamond-Like Carbon Microcantilever Arrays.
671-674
Electronic Edition (link) BibTeX
- Shashidhar Pati, C. Venkatesh, Navakanta Bhat, Rudra Pratap:
Voltage Controlled Oscillator Using Tunable Mems Resonator.
675-678
Electronic Edition (link) BibTeX
- Min Hu, Hejun Du, Shih-Fu Ling, Bo Liu:
A Rotary Micromirror For Fiber-Optic Switching.
679-682
Electronic Edition (link) BibTeX
- Aiping Fang, Hian Kee Lee, Suresh Valiyaveeti:
Microfluidic Channels Modified With Collodial Palladium As An Efficient Catalyst For High Throughput Suzuki Coupling Reactions.
683-686
Electronic Edition (link) BibTeX
- Ciprian Iliescu, Tietun Sun, Jianmin Miao, Francis Eng Hock Tay:
Fabrication Process Of A Capacitive Microphone With p++ Diaphragm And Silicon Bonded Top-Plate.
687-690
Electronic Edition (link) BibTeX
- Min Hu, Hejun Du, Shih-Fu Ling, Bo Liu:
Development Of An Soi-Based Micro Check Valve.
691-694
Electronic Edition (link) BibTeX
- Jeng T. Sheu, Cheng C. Chen, Sun P. Yeh, Hseih T. Chou:
Fabrication Of Ultrahigh-Density Nano-Pyramid Arrays (Npas) On (100) Silicon Wafer Using Scanning Probe Lithography And Anisotropic Wet Etching.
695-698
Electronic Edition (link) BibTeX
- Jeng T. Sheu, Cheng C. Chen, Sun P. Yeh, Hseih T. Chou:
Nanometer-Scale Patterning On Titanium Thin Film With Local Oxidation Of Scanning Probe Microscope.
699-702
Electronic Edition (link) BibTeX
- Miroslav Husak, P. Kulha, Jiri Jakovenko, Z. Vyborny:
Mechanical, Thermal And Electrical Behaviour Of Si Strain Gauge.
703-706
Electronic Edition (link) BibTeX
- Masaaki Ichiki, Lulu Zhang, Zhen Yang, Tsuyoshi Ikehara, Ryutaro Maeda:
Thin Film Formation On Non-Planar Surface With Use Of Spray Coating Fabrication.
707-710
Electronic Edition (link) BibTeX
- S. Myllymaki, Eero Ristolainen, P. Heino, A. Lehto, K. Varjonen:
Evaluation Of Resonating Channel Transistor In SOI Wafer.
711-714
Electronic Edition (link) BibTeX
- Y. Chen, S. Janak, S. Uppili:
A Fabrication Method To Form Glass Capillary.
715-718
Electronic Edition (link) BibTeX
- V. A. Kudryashov, X.-C. Yuan, T. L. Tan, P. Lee, S. F. A. Karim, B. L. Tan:
3d Structures Formation In A Single Layer Su-8 Car Using Dual Uv And Electron-Beam Lithography.
719-723
Electronic Edition (link) BibTeX
- X. C. Shan, Ryutaro Maeda, Tsuyoshi Ikehara, Z. F. Wang, C. K. Wong:
A Polymer-Based Optical Switch Fabricated Using Silicon Process, Electroplating And Micro Hot Embossing.
724-728
Electronic Edition (link) BibTeX
- Z. W. Zhong, K. S. Goh:
New Development To Extend The Tool Life Of Ceramic Bonding Tools.
729-732
Electronic Edition (link) BibTeX
- Z. W. Zhong, K. C. Chan, Y. H. Chen:
Characterisation Of Electroplated Eutectic Sn-Ag Solder.
733-736
Electronic Edition (link) BibTeX
Volume 4,
Number 4,
December 2003
Copyright © Sun May 17 00:01:26 2009
by Michael Ley (ley@uni-trier.de)