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| 2003 | ||
|---|---|---|
| 1 | EE | Andreas H. Foitzik, Wolfgang Kaese, Thomas Vogt, Michael Sommerer, Serguei Arkhipov: Static And Dynamic Characterization Of Mems Via ESPI. International Journal of Computational Engineering Science 4(3): 467-470 (2003) |
| 1 | Serguei Arkhipov | [1] |
| 2 | Andreas H. Foitzik | [1] |
| 3 | Wolfgang Kaese | [1] |
| 4 | Thomas Vogt | [1] |