2003 | ||
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2 | EE | Prem Pal, Suneet Tuli, Sudhir Chandra: Design And Fabrication Of SIO2 Micromechanical Structures Inside Anisotropically Etched Cavity. International Journal of Computational Engineering Science 4(3): 489-492 (2003) |
1 | EE | Sudhir Chandra, Vivekanand Bhatt, Shrawan K. Jha: Sputtered Silicon Dioxide Films For Mems Application. International Journal of Computational Engineering Science 4(3): 521-524 (2003) |
1 | Vivekanand Bhatt | [1] |
2 | Shrawan K. Jha | [1] |
3 | Prem Pal | [2] |
4 | Suneet Tuli | [2] |