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2003 | ||
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1 | EE | Prem Pal, Suneet Tuli, Sudhir Chandra: Design And Fabrication Of SIO2 Micromechanical Structures Inside Anisotropically Etched Cavity. International Journal of Computational Engineering Science 4(3): 489-492 (2003) |
1 | Sudhir Chandra | [1] |
2 | Prem Pal | [1] |