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2003 | ||
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2 | EE | W. J. Wang, R. M. Lin, T. T. Sun, D. G. Guo: A Novel Mems Fabry-Perot Microcavity Structure For Pressure Sensing Application. International Journal of Computational Engineering Science 4(2): 409-412 (2003) |
1 | EE | W. J. Wang, R. M. Lin, Y. Ren, X. X. Li: Performance of a novel non-planar diaphragm for high-sensitivity structures. Microelectronics Journal 34(9): 791-796 (2003) |
1 | D. G. Guo | [2] |
2 | X. X. Li | [1] |
3 | R. M. Lin | [1] [2] |
4 | Y. Ren | [1] |
5 | T. T. Sun | [2] |