| |
| 2003 | ||
|---|---|---|
| 1 | EE | Matthias Küchler, Thomas Otto, Thomas Gessner, Frank Ebling, Henning Schröder: Hot Embossing For Mems Using Silicon Tools. International Journal of Computational Engineering Science 4(3): 609-612 (2003) |
| 1 | Thomas Gessner | [1] |
| 2 | Matthias Küchler | [1] |
| 3 | Thomas Otto | [1] |
| 4 | Henning Schröder | [1] |