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| 2003 | ||
|---|---|---|
| 1 | EE | Thomas Gessner, Andreas Bertz, Christian Lohmann, Steffen Kurth, Karla Hiller: Advanced Silicon Micromachining. International Journal of Computational Engineering Science 4(2): 151 (2003) |
| 1 | Andreas Bertz | [1] |
| 2 | Thomas Gessner | [1] |
| 3 | Steffen Kurth | [1] |
| 4 | Christian Lohmann | [1] |