2003 | ||
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1 | EE | Liujiang Yu, B. K. Tay, D. Sheeja, Y. Q. Fu, Jianmin Miao: Fabrication Of Amorphous Carbon Micro-Membranes By Deep Reactive Ion Etching Technique. International Journal of Computational Engineering Science 4(3): 581-584 (2003) |
1 | Y. Q. Fu | [1] |
2 | Jianmin Miao | [1] |
3 | D. Sheeja | [1] |
4 | B. K. Tay | [1] |