2005 |
3 | EE | E. Sleeckx,
Marc Schaekers,
X. Shi,
E. Kunnen,
B. Degroote,
M. Jurczak,
M. de Potter de ten Broeck,
E. Augendre:
Optimization of low temperature silicon nitride processes for improvement of device performance.
Microelectronics Reliability 45(5-6): 865-868 (2005) |
2001 |
2 | EE | M. Da Rold,
E. Simoen,
Sofie Mertens,
Marc Schaekers,
G. Badenes,
Stefaan Decoutere:
Impact of gate oxide nitridation process on 1/f noise in 0.18 mum CMOS.
Microelectronics Reliability 41(12): 1933-1938 (2001) |
1999 |
1 | EE | Marc M. Heyns,
Twan Bearda,
Ingrid Cornelissen,
Stefan De Gendt,
Robin Degraeve,
Guido Groeseneken,
Conny Kenens,
D. Martin Knotter,
Lee M. Loewenstein,
Paul W. Mertens,
Sofie Mertens,
Marc Meuris,
Tanya Nigam,
Marc Schaekers,
Ivo Teerlinck,
Wilfried Vandervorst,
Rita Vos,
Klaus Wolke:
Cost-effective cleaning and high-quality thin gate oxides.
IBM Journal of Research and Development 43(3): 339-350 (1999) |