| |
| 2005 | ||
|---|---|---|
| 1 | EE | E. Sleeckx, Marc Schaekers, X. Shi, E. Kunnen, B. Degroote, M. Jurczak, M. de Potter de ten Broeck, E. Augendre: Optimization of low temperature silicon nitride processes for improvement of device performance. Microelectronics Reliability 45(5-6): 865-868 (2005) |
| 1 | M. de Potter de ten Broeck | [1] |
| 2 | B. Degroote | [1] |
| 3 | M. Jurczak | [1] |
| 4 | E. Kunnen | [1] |
| 5 | Marc Schaekers | [1] |
| 6 | X. Shi | [1] |
| 7 | E. Sleeckx | [1] |