2005 |
3 | EE | X. Blasco,
M. Nafría,
X. Aymerich,
J. Pétry,
Wilfried Vandervorst:
Breakdown spots of ultra-thin (EOT<1.5nm) HfO2/SiO2 stacks observed with enhanced - CAFM.
Microelectronics Reliability 45(5-6): 811-814 (2005) |
2 | EE | J. Pétry,
Wilfried Vandervorst,
L. Pantisano,
Robin Degraeve:
On the data interpretation of the C-AFM measurements in the characterization of thin insulating layers.
Microelectronics Reliability 45(5-6): 815-818 (2005) |
1999 |
1 | EE | Marc M. Heyns,
Twan Bearda,
Ingrid Cornelissen,
Stefan De Gendt,
Robin Degraeve,
Guido Groeseneken,
Conny Kenens,
D. Martin Knotter,
Lee M. Loewenstein,
Paul W. Mertens,
Sofie Mertens,
Marc Meuris,
Tanya Nigam,
Marc Schaekers,
Ivo Teerlinck,
Wilfried Vandervorst,
Rita Vos,
Klaus Wolke:
Cost-effective cleaning and high-quality thin gate oxides.
IBM Journal of Research and Development 43(3): 339-350 (1999) |