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1999 | ||
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1 | EE | Marc M. Heyns, Twan Bearda, Ingrid Cornelissen, Stefan De Gendt, Robin Degraeve, Guido Groeseneken, Conny Kenens, D. Martin Knotter, Lee M. Loewenstein, Paul W. Mertens, Sofie Mertens, Marc Meuris, Tanya Nigam, Marc Schaekers, Ivo Teerlinck, Wilfried Vandervorst, Rita Vos, Klaus Wolke: Cost-effective cleaning and high-quality thin gate oxides. IBM Journal of Research and Development 43(3): 339-350 (1999) |
1 | Twan Bearda | [1] |
2 | Ingrid Cornelissen | [1] |
3 | Robin Degraeve | [1] |
4 | Stefan De Gendt | [1] |
5 | Guido Groeseneken | [1] |
6 | Marc M. Heyns | [1] |
7 | D. Martin Knotter | [1] |
8 | Lee M. Loewenstein | [1] |
9 | Paul W. Mertens | [1] |
10 | Sofie Mertens | [1] |
11 | Marc Meuris | [1] |
12 | Tanya Nigam | [1] |
13 | Marc Schaekers | [1] |
14 | Ivo Teerlinck | [1] |
15 | Wilfried Vandervorst | [1] |
16 | Rita Vos | [1] |
17 | Klaus Wolke | [1] |