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J. Pétry

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2005
2EEX. Blasco, M. Nafría, X. Aymerich, J. Pétry, Wilfried Vandervorst: Breakdown spots of ultra-thin (EOT<1.5nm) HfO2/SiO2 stacks observed with enhanced - CAFM. Microelectronics Reliability 45(5-6): 811-814 (2005)
1EEJ. Pétry, Wilfried Vandervorst, L. Pantisano, Robin Degraeve: On the data interpretation of the C-AFM measurements in the characterization of thin insulating layers. Microelectronics Reliability 45(5-6): 815-818 (2005)

Coauthor Index

1X. Aymerich [2]
2X. Blasco [2]
3Robin Degraeve [1]
4M. Nafría [2]
5L. Pantisano [1]
6Wilfried Vandervorst [1] [2]

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