2005 |
3 | EE | J. M. Decams,
H. Guillon,
C. Jiménez,
M. Audier,
J. P. Sénateur,
C. Dubourdieu,
O. Cadix,
B. J. O'Sullivan,
M. Modreanu,
P. K. Hurley:
Electrical characterization of HfO2 films obtained by UV assisted injection MOCVD.
Microelectronics Reliability 45(5-6): 929-932 (2005) |
2 | EE | Q. Fang,
I. Liaw,
M. Modreanu,
P. K. Hurley,
I. W. Boyd:
Post deposition UV-induced O2 annealing of HfO2 thin films.
Microelectronics Reliability 45(5-6): 957-960 (2005) |
1 | EE | E. Halova,
S. Alexandrova,
A. Szekeres,
M. Modreanu:
LPCVD-silicon oxynitride films: interface properties.
Microelectronics Reliability 45(5-6): 982-985 (2005) |