S. Alexandrova
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2005
1
EE
E. Halova
, S. Alexandrova,
A. Szekeres
,
M. Modreanu
: LPCVD-silicon oxynitride films: interface properties.
Microelectronics Reliability 45
(5-6): 982-985 (2005)
Coauthor
Index
1
E. Halova
[
1
]
2
M. Modreanu
[
1
]
3
A. Szekeres
[
1
]
Copyright ©
Sun May 17 03:24:02 2009 by
Michael Ley
(
ley@uni-trier.de
)
