2005 | ||
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2 | EE | T. Schram, L.-Å. Ragnarsson, G. Lujan, W. Deweerd, J. Chen, W. Tsai, K. Henson, R. J. P. Lander, J. C. Hooker, J. Vertommen: Performance improvement of self-aligned HfO2/TaN and SiON/TaN nMOS transistors. Microelectronics Reliability 45(5-6): 779-782 (2005) |
1 | EE | W. Deweerd, V. Kaushik, J. Chen, Y. Shimamoto, T. Schram, L.-Å. Ragnarsson, A. Delabie, L. Pantisano, B. Eyckens, J. W. Maes: Potential remedies for the VT/Vfb-shift problem of Hf/polysilicon-based gate stacks: a solution-based survey. Microelectronics Reliability 45(5-6): 786-789 (2005) |
1 | J. Chen | [1] [2] |
2 | A. Delabie | [1] |
3 | B. Eyckens | [1] |
4 | K. Henson | [2] |
5 | J. C. Hooker | [2] |
6 | V. Kaushik | [1] |
7 | R. J. P. Lander | [2] |
8 | G. Lujan | [2] |
9 | J. W. Maes | [1] |
10 | L. Pantisano | [1] |
11 | L.-Å. Ragnarsson | [1] [2] |
12 | T. Schram | [1] [2] |
13 | Y. Shimamoto | [1] |
14 | W. Tsai | [2] |
15 | J. Vertommen | [2] |