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K. Henson

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2005
2EES. Beckx, M. Demand, S. Locorotondo, K. Henson, M. Claes, V. Paraschiv, D. Shamiryan, P. Jaenen, W. Boullart, S. Degendt: Implementation of high-k and metal gate materials for the 45nm node and beyond: gate patterning development. Microelectronics Reliability 45(5-6): 1007-1011 (2005)
1EET. Schram, L.-Å. Ragnarsson, G. Lujan, W. Deweerd, J. Chen, W. Tsai, K. Henson, R. J. P. Lander, J. C. Hooker, J. Vertommen: Performance improvement of self-aligned HfO2/TaN and SiON/TaN nMOS transistors. Microelectronics Reliability 45(5-6): 779-782 (2005)

Coauthor Index

1S. Beckx [2]
2W. Boullart [2]
3J. Chen [1]
4M. Claes [2]
5S. Degendt [2]
6M. Demand [2]
7W. Deweerd [1]
8J. C. Hooker [1]
9P. Jaenen [2]
10R. J. P. Lander [1]
11S. Locorotondo [2]
12G. Lujan [1]
13V. Paraschiv [2]
14L.-Å. Ragnarsson [1]
15T. Schram [1]
16D. Shamiryan [2]
17W. Tsai [1]
18J. Vertommen [1]

Colors in the list of coauthors

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