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2005 | ||
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1 | EE | T. Schram, L.-Å. Ragnarsson, G. Lujan, W. Deweerd, J. Chen, W. Tsai, K. Henson, R. J. P. Lander, J. C. Hooker, J. Vertommen: Performance improvement of self-aligned HfO2/TaN and SiON/TaN nMOS transistors. Microelectronics Reliability 45(5-6): 779-782 (2005) |
1 | J. Chen | [1] |
2 | W. Deweerd | [1] |
3 | K. Henson | [1] |
4 | J. C. Hooker | [1] |
5 | G. Lujan | [1] |
6 | L.-Å. Ragnarsson | [1] |
7 | T. Schram | [1] |
8 | W. Tsai | [1] |
9 | J. Vertommen | [1] |