2006 |
3 | EE | Makoto Sugihara,
Taiga Takata,
Kenta Nakamura,
Ryoichi Inanami,
Hiroaki Hayashi,
Katsumi Kishimoto,
Tetsuya Hasebe,
Yukihiro Kawano,
Yusuke Matsunaga,
Kazuaki Murakami,
Katsuya Okumura:
A character size optimization technique for throughput enhancement of character projection lithography.
ISCAS 2006 |
2 | EE | Makoto Sugihara,
Taiga Takata,
Kenta Nakamura,
Ryoichi Inanami,
Hiroaki Hayashi,
Katsumi Kishimoto,
Tetsuya Hasebe,
Yukihiro Kawano,
Yusuke Matsunaga,
Kazuaki Murakami,
Katsuya Okumura:
Cell Library Development Methodology for Throughput Enhancement of Character Projection Equipment.
IEICE Transactions 89-C(3): 377-383 (2006) |
2002 |
1 | EE | Kenichi Kataoka,
Toshihiro Itoh,
Katsuya Okumura,
Tadatomo Suga:
Low-Contact-Force Probing on Copper Electrodes.
ITC 2002: 424-429 |