2007 |
3 | EE | Makoto Sugihara,
Kenta Nakamura,
Yusuke Matsunaga,
Kazuaki Murakami:
Technology Mapping Technique for Increasing Throughput of Character Projection Lithography.
IEICE Transactions 90-C(5): 1012-1020 (2007) |
2006 |
2 | EE | Makoto Sugihara,
Taiga Takata,
Kenta Nakamura,
Ryoichi Inanami,
Hiroaki Hayashi,
Katsumi Kishimoto,
Tetsuya Hasebe,
Yukihiro Kawano,
Yusuke Matsunaga,
Kazuaki Murakami,
Katsuya Okumura:
A character size optimization technique for throughput enhancement of character projection lithography.
ISCAS 2006 |
1 | EE | Makoto Sugihara,
Taiga Takata,
Kenta Nakamura,
Ryoichi Inanami,
Hiroaki Hayashi,
Katsumi Kishimoto,
Tetsuya Hasebe,
Yukihiro Kawano,
Yusuke Matsunaga,
Kazuaki Murakami,
Katsuya Okumura:
Cell Library Development Methodology for Throughput Enhancement of Character Projection Equipment.
IEICE Transactions 89-C(3): 377-383 (2006) |