| 2006 |
|---|
| 2 | EE | Makoto Sugihara,
Taiga Takata,
Kenta Nakamura,
Ryoichi Inanami,
Hiroaki Hayashi,
Katsumi Kishimoto,
Tetsuya Hasebe,
Yukihiro Kawano,
Yusuke Matsunaga,
Kazuaki Murakami,
Katsuya Okumura:
A character size optimization technique for throughput enhancement of character projection lithography.
ISCAS 2006 |
| 1 | EE | Makoto Sugihara,
Taiga Takata,
Kenta Nakamura,
Ryoichi Inanami,
Hiroaki Hayashi,
Katsumi Kishimoto,
Tetsuya Hasebe,
Yukihiro Kawano,
Yusuke Matsunaga,
Kazuaki Murakami,
Katsuya Okumura:
Cell Library Development Methodology for Throughput Enhancement of Character Projection Equipment.
IEICE Transactions 89-C(3): 377-383 (2006) |
