1999 |
2 | EE | W. W. (Bill) Abadeer,
Asmik Bagramian,
David W. Conkle,
Charles W. Griffin,
Eric Langlois,
Brian F. Lloyd,
Raymond P. Mallette,
James E. Massucco,
Jonathan M. McKenna,
Steven W. Mittl,
Philip H. Noel:
Key measurements of ultrathin gate dielectric reliability and in-line monitoring.
IBM Journal of Research and Development 43(3): 407-416 (1999) |
1995 |
1 | | Donald G. Chesebro,
James W. Adkisson,
Lyman R. Clark,
Steven N. Eslinger,
Margaret A. Faucher,
Steven J. Holmes,
Raymond P. Mallette,
Edward J. Nowak,
Edward W. Sengle,
Steven H. Voldman,
Thomas W. Weeks:
Overview of gate linewidth control in the manufacture of CMOS logic chips.
IBM Journal of Research and Development 39(1-2): 189-200 (1995) |