| |
| 1995 | ||
|---|---|---|
| 1 | Donald G. Chesebro, James W. Adkisson, Lyman R. Clark, Steven N. Eslinger, Margaret A. Faucher, Steven J. Holmes, Raymond P. Mallette, Edward J. Nowak, Edward W. Sengle, Steven H. Voldman, Thomas W. Weeks: Overview of gate linewidth control in the manufacture of CMOS logic chips. IBM Journal of Research and Development 39(1-2): 189-200 (1995) | |
| 1 | James W. Adkisson | [1] |
| 2 | Donald G. Chesebro | [1] |
| 3 | Steven N. Eslinger | [1] |
| 4 | Margaret A. Faucher | [1] |
| 5 | Steven J. Holmes | [1] |
| 6 | Raymond P. Mallette | [1] |
| 7 | Edward J. Nowak | [1] |
| 8 | Edward W. Sengle | [1] |
| 9 | Steven H. Voldman | [1] |
| 10 | Thomas W. Weeks | [1] |