| 2007 |
|---|
| 3 | EE | Hirotaka Komoda,
Chie Moritani,
Kazutaka Takahashi,
Heiji Watanabe,
Kiyoshi Yasutake:
Sample tilting technique for preventing electrostatic discharge during high-current FIB gas-assisted etching with XeF2.
Microelectronics Reliability 47(1): 74-81 (2007) |
| 2006 |
|---|
| 2 | EE | Hirotaka Komoda,
Masaaki Yoshida,
Yoh Yamamoto,
Kouji Iwasaki,
Ikuko Nakatani,
Heiji Watanabe,
Kiyoshi Yasutake:
Novel charge neutralization techniques applicable to wide current range of FIB processing in FIB-SEM combined system.
Microelectronics Reliability 46(12): 2085-2095 (2006) |
| 2004 |
|---|
| 1 | EE | Yoshiteru Yamada,
Hirotaka Komoda:
An example of fault site localization on a 0.18 mum CMOS device with combination of front and backside techniques.
Microelectronics Reliability 44(5): 771-778 (2004) |
