| |
| 2007 | ||
|---|---|---|
| 1 | EE | Hirotaka Komoda, Chie Moritani, Kazutaka Takahashi, Heiji Watanabe, Kiyoshi Yasutake: Sample tilting technique for preventing electrostatic discharge during high-current FIB gas-assisted etching with XeF2. Microelectronics Reliability 47(1): 74-81 (2007) |
| 1 | Hirotaka Komoda | [1] |
| 2 | Chie Moritani | [1] |
| 3 | Heiji Watanabe | [1] |
| 4 | Kiyoshi Yasutake | [1] |