2006 | ||
---|---|---|
1 | EE | Hirotaka Komoda, Masaaki Yoshida, Yoh Yamamoto, Kouji Iwasaki, Ikuko Nakatani, Heiji Watanabe, Kiyoshi Yasutake: Novel charge neutralization techniques applicable to wide current range of FIB processing in FIB-SEM combined system. Microelectronics Reliability 46(12): 2085-2095 (2006) |
1 | Kouji Iwasaki | [1] |
2 | Hirotaka Komoda | [1] |
3 | Ikuko Nakatani | [1] |
4 | Heiji Watanabe | [1] |
5 | Kiyoshi Yasutake | [1] |
6 | Masaaki Yoshida | [1] |