| |
| 2007 | ||
|---|---|---|
| 2 | EE | Hirotaka Komoda, Chie Moritani, Kazutaka Takahashi, Heiji Watanabe, Kiyoshi Yasutake: Sample tilting technique for preventing electrostatic discharge during high-current FIB gas-assisted etching with XeF2. Microelectronics Reliability 47(1): 74-81 (2007) |
| 2006 | ||
| 1 | EE | Hirotaka Komoda, Masaaki Yoshida, Yoh Yamamoto, Kouji Iwasaki, Ikuko Nakatani, Heiji Watanabe, Kiyoshi Yasutake: Novel charge neutralization techniques applicable to wide current range of FIB processing in FIB-SEM combined system. Microelectronics Reliability 46(12): 2085-2095 (2006) |
| 1 | Kouji Iwasaki | [1] |
| 2 | Hirotaka Komoda | [1] [2] |
| 3 | Chie Moritani | [2] |
| 4 | Ikuko Nakatani | [1] |
| 5 | Kazutaka Takahashi | [2] |
| 6 | Heiji Watanabe | [1] [2] |
| 7 | Yoh Yamamoto | [1] |
| 8 | Masaaki Yoshida | [1] |