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Kiyoshi Yasutake

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2007
2EEHirotaka Komoda, Chie Moritani, Kazutaka Takahashi, Heiji Watanabe, Kiyoshi Yasutake: Sample tilting technique for preventing electrostatic discharge during high-current FIB gas-assisted etching with XeF2. Microelectronics Reliability 47(1): 74-81 (2007)
2006
1EEHirotaka Komoda, Masaaki Yoshida, Yoh Yamamoto, Kouji Iwasaki, Ikuko Nakatani, Heiji Watanabe, Kiyoshi Yasutake: Novel charge neutralization techniques applicable to wide current range of FIB processing in FIB-SEM combined system. Microelectronics Reliability 46(12): 2085-2095 (2006)

Coauthor Index

1Kouji Iwasaki [1]
2Hirotaka Komoda [1] [2]
3Chie Moritani [2]
4Ikuko Nakatani [1]
5Kazutaka Takahashi [2]
6Heiji Watanabe [1] [2]
7Yoh Yamamoto [1]
8Masaaki Yoshida [1]

Copyright © Sun May 17 03:24:02 2009 by Michael Ley (ley@uni-trier.de)