L. Y. Wong

2005
2	EE	C. F. Tsang, C. K. Chang, A. Krishnamoorthy, K. Y. Ee, Y. J. Su, H. Y. Li, W. H. Li, L. Y. Wong: A study of post-etch wet clean on electrical and reliability performance of Cu/low k interconnections. Microelectronics Reliability 45(3-4): 517-525 (2005)
2004
1	EE	C. F. Tsang, C. Y. Li, A. Krishnamoorthy, Y. J. Su, H. Y. Li, L. Y. Wong, W. H. Li, L. J. Tang, K. Y. Ee: Impact of barrier deposition process on electrical and reliability performance of Cu/CVD low k SiOCH metallization. Microelectronics Journal 35(9): 693-700 (2004)

Coauthor Index

1	C. K. Chang	[2]
2	K. Y. Ee	[1] [2]
3	A. Krishnamoorthy	[1] [2]
4	C. Y. Li	[1]
5	H. Y. Li	[1] [2]
6	W. H. Li	[1] [2]
7	Y. J. Su	[1] [2]
8	L. J. Tang	[1]
9	C. F. Tsang	[1] [2]