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L. Y. Wong

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2005
2EEC. F. Tsang, C. K. Chang, A. Krishnamoorthy, K. Y. Ee, Y. J. Su, H. Y. Li, W. H. Li, L. Y. Wong: A study of post-etch wet clean on electrical and reliability performance of Cu/low k interconnections. Microelectronics Reliability 45(3-4): 517-525 (2005)
2004
1EEC. F. Tsang, C. Y. Li, A. Krishnamoorthy, Y. J. Su, H. Y. Li, L. Y. Wong, W. H. Li, L. J. Tang, K. Y. Ee: Impact of barrier deposition process on electrical and reliability performance of Cu/CVD low k SiOCH metallization. Microelectronics Journal 35(9): 693-700 (2004)

Coauthor Index

1C. K. Chang [2]
2K. Y. Ee [1] [2]
3A. Krishnamoorthy [1] [2]
4C. Y. Li [1]
5H. Y. Li [1] [2]
6W. H. Li [1] [2]
7Y. J. Su [1] [2]
8L. J. Tang [1]
9C. F. Tsang [1] [2]

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