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C. Y. Li

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2004
1EEC. F. Tsang, C. Y. Li, A. Krishnamoorthy, Y. J. Su, H. Y. Li, L. Y. Wong, W. H. Li, L. J. Tang, K. Y. Ee: Impact of barrier deposition process on electrical and reliability performance of Cu/CVD low k SiOCH metallization. Microelectronics Journal 35(9): 693-700 (2004)

Coauthor Index

1K. Y. Ee [1]
2A. Krishnamoorthy [1]
3H. Y. Li [1]
4W. H. Li [1]
5Y. J. Su [1]
6L. J. Tang [1]
7C. F. Tsang [1]
8L. Y. Wong [1]

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