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S. Orain

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2007
2EEF. Cacho, S. Orain, G. Cailletaud, H. Jaouen: A constitutive single crystal model for the silicon mechanical behavior: Applications to the stress induced by silicided lines and STI in MOS technologies. Microelectronics Reliability 47(2-3): 161-167 (2007)
1EES. Orain, J.-C. Barbé, X. Federspiel, P. Legallo, H. Jaouen: FEM-based method to determine mechanical stress evolution during process flow in microelectronics, application to stress-voiding. Microelectronics Reliability 47(2-3): 295-301 (2007)

Coauthor Index

1J.-C. Barbé [1]
2F. Cacho [2]
3G. Cailletaud [2]
4X. Federspiel [1]
5H. Jaouen [1] [2]
6P. Legallo [1]

Copyright © Sun May 17 03:24:02 2009 by Michael Ley (ley@uni-trier.de)