F. Cacho

2007
1	EE	F. Cacho, S. Orain, G. Cailletaud, H. Jaouen: A constitutive single crystal model for the silicon mechanical behavior: Applications to the stress induced by silicided lines and STI in MOS technologies. Microelectronics Reliability 47(2-3): 161-167 (2007)

Coauthor Index

1	G. Cailletaud	[1]
2	H. Jaouen	[1]
3	S. Orain	[1]