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2007 | ||
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1 | EE | F. Cacho, S. Orain, G. Cailletaud, H. Jaouen: A constitutive single crystal model for the silicon mechanical behavior: Applications to the stress induced by silicided lines and STI in MOS technologies. Microelectronics Reliability 47(2-3): 161-167 (2007) |
1 | F. Cacho | [1] |
2 | H. Jaouen | [1] |
3 | S. Orain | [1] |