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P. Legallo

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2007
1EES. Orain, J.-C. Barbé, X. Federspiel, P. Legallo, H. Jaouen: FEM-based method to determine mechanical stress evolution during process flow in microelectronics, application to stress-voiding. Microelectronics Reliability 47(2-3): 295-301 (2007)

Coauthor Index

1J.-C. Barbé [1]
2X. Federspiel [1]
3H. Jaouen [1]
4S. Orain [1]

Copyright © Sun May 17 03:24:02 2009 by Michael Ley (ley@uni-trier.de)