| |
| 2007 | ||
|---|---|---|
| 1 | EE | S. Orain, J.-C. Barbé, X. Federspiel, P. Legallo, H. Jaouen: FEM-based method to determine mechanical stress evolution during process flow in microelectronics, application to stress-voiding. Microelectronics Reliability 47(2-3): 295-301 (2007) |
| 1 | X. Federspiel | [1] |
| 2 | H. Jaouen | [1] |
| 3 | P. Legallo | [1] |
| 4 | S. Orain | [1] |