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2007 | ||
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2 | EE | F. Cacho, S. Orain, G. Cailletaud, H. Jaouen: A constitutive single crystal model for the silicon mechanical behavior: Applications to the stress induced by silicided lines and STI in MOS technologies. Microelectronics Reliability 47(2-3): 161-167 (2007) |
1 | EE | S. Orain, J.-C. Barbé, X. Federspiel, P. Legallo, H. Jaouen: FEM-based method to determine mechanical stress evolution during process flow in microelectronics, application to stress-voiding. Microelectronics Reliability 47(2-3): 295-301 (2007) |
1 | J.-C. Barbé | [1] |
2 | F. Cacho | [2] |
3 | G. Cailletaud | [2] |
4 | X. Federspiel | [1] |
5 | P. Legallo | [1] |
6 | S. Orain | [1] [2] |