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Anton J. Bauer

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2005
6EEMartin Lemberger, Albena Paskaleva, Stefan Zürcher, Anton J. Bauer, Lothar Frey, Heiner Ryssel: Electrical properties of hafnium silicate films obtained from a single-source MOCVD precursor. Microelectronics Reliability 45(5-6): 819-822 (2005)
5EEAlbena Paskaleva, Anton J. Bauer, Martin Lemberger: Conduction mechanisms and an evidence for phonon-assisted conduction process in thin high-k HfxTiySizO films. Microelectronics Reliability 45(7-8): 1124-1133 (2005)
2003
4EEAlbena Paskaleva, Martin Lemberger, Stefan Zürcher, Anton J. Bauer, Lothar Frey, Heiner Ryssel: Electrical characterization of zirconium silicate films obtained from novel MOCVD precursors. Microelectronics Reliability 43(8): 1253-1257 (2003)
2001
3EES. Strobel, Anton J. Bauer, Matthias Beichele, Heiner Ryssel: Suppression of boron penetration through thin gate oxides by nitrogen implantation into the gate electrode in PMOS devices. Microelectronics Reliability 41(7): 1085-1088 (2001)
2EEMatthias Beichele, Anton J. Bauer, Heiner Ryssel: Reliability of ultrathin nitrided oxides grown in low pressure N2O ambient. Microelectronics Reliability 41(7): 1089-1092 (2001)
1EEM. P. M. Jank, Martin Lemberger, Anton J. Bauer, Lothar Frey, Heiner Ryssel: Electrical reliability aspects of through the gate implanted MOS structures with thin oxides. Microelectronics Reliability 41(7): 987-990 (2001)

Coauthor Index

1Matthias Beichele [2] [3]
2Lothar Frey [1] [4] [6]
3M. P. M. Jank [1]
4Martin Lemberger [1] [4] [5] [6]
5Albena Paskaleva [4] [5] [6]
6Heiner Ryssel [1] [2] [3] [4] [6]
7S. Strobel [3]
8Stefan Zürcher [4] [6]

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