| 2005 |
|---|
| 2 | EE | Martin Lemberger,
Albena Paskaleva,
Stefan Zürcher,
Anton J. Bauer,
Lothar Frey,
Heiner Ryssel:
Electrical properties of hafnium silicate films obtained from a single-source MOCVD precursor.
Microelectronics Reliability 45(5-6): 819-822 (2005) |
| 2003 |
|---|
| 1 | EE | Albena Paskaleva,
Martin Lemberger,
Stefan Zürcher,
Anton J. Bauer,
Lothar Frey,
Heiner Ryssel:
Electrical characterization of zirconium silicate films obtained from novel MOCVD precursors.
Microelectronics Reliability 43(8): 1253-1257 (2003) |
