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Rudolf Schlangen

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2006
2EERudolf Schlangen, Peter Sadewater, Uwe Kerst, Christian Boit: Contact to contacts or silicide by use of backside FIB circuit edit allowing to approach every active circuit node. Microelectronics Reliability 46(9-11): 1498-1503 (2006)
2005
1EERudolf Schlangen, Uwe Kerst, A. Kabakow, Christian Boit: Electrical Performance Evaluation of FIB Edited Circuits through Chip Backside Exposing Shallow Trench Isolations. Microelectronics Reliability 45(9-11): 1544-1549 (2005)

Coauthor Index

1Christian Boit [1] [2]
2A. Kabakow [1]
3Uwe Kerst [1] [2]
4Peter Sadewater [2]

Copyright © Sun May 17 03:24:02 2009 by Michael Ley (ley@uni-trier.de)