2006 | ||
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2 | EE | Rudolf Schlangen, Peter Sadewater, Uwe Kerst, Christian Boit: Contact to contacts or silicide by use of backside FIB circuit edit allowing to approach every active circuit node. Microelectronics Reliability 46(9-11): 1498-1503 (2006) |
2005 | ||
1 | EE | Rudolf Schlangen, Uwe Kerst, A. Kabakow, Christian Boit: Electrical Performance Evaluation of FIB Edited Circuits through Chip Backside Exposing Shallow Trench Isolations. Microelectronics Reliability 45(9-11): 1544-1549 (2005) |
1 | Christian Boit | [1] [2] |
2 | A. Kabakow | [1] |
3 | Peter Sadewater | [2] |
4 | Rudolf Schlangen | [1] [2] |