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2006 | ||
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1 | EE | Rudolf Schlangen, Peter Sadewater, Uwe Kerst, Christian Boit: Contact to contacts or silicide by use of backside FIB circuit edit allowing to approach every active circuit node. Microelectronics Reliability 46(9-11): 1498-1503 (2006) |
1 | Christian Boit | [1] |
2 | Uwe Kerst | [1] |
3 | Rudolf Schlangen | [1] |