| 2003 |
|---|
| 3 | EE | Clemens Heitzinger,
Wolfgang Pyka,
Naoki Tamaoki,
Toshiro Takase,
Toshimitsu Ohmine,
Siegfried Selberherr:
Simulation of arsenic in situ doping with polysilicon CVD and its application to high aspect ratio trenches.
IEEE Trans. on CAD of Integrated Circuits and Systems 22(3): 285-292 (2003) |
| 1999 |
|---|
| 2 | EE | Wolfgang Pyka,
Peter Fleischmann,
Bernhard Haindl,
Siegfried Selberherr:
Three-dimensional simulation of HPCVD-linking continuum transport and reaction kinetics with topography simulation.
IEEE Trans. on CAD of Integrated Circuits and Systems 18(12): 1741-1749 (1999) |
| 1998 |
|---|
| 1 | EE | Rui Martins,
Wolfgang Pyka,
Rainer Sabelka,
Siegfried Selberherr:
High-precision interconnect analysis.
IEEE Trans. on CAD of Integrated Circuits and Systems 17(11): 1148-1159 (1998) |
