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1999 | ||
---|---|---|
2 | EE | Michael Armacost, Peter D. Hoh, Richard Wise, Wendy Yan, Jeffrey J. Brown, John H. Keller, George A. Kaplita, Scott D. Halle, K. Paul Muller, Munir D. Naeem, Senthil Srinivasan, Hung Y. Ng, Martin Gutsche, Alois Gutmann, Bruno Spuler: Plasma-etching processes for ULSI semiconductor circuits. IBM Journal of Research and Development 43(1): 39-72 (1999) |
1995 | ||
1 | EE | Eric Adler, John K. DeBrosse, Stephen F. Geissler, Steven J. Holmes, Mark D. Jaffe, Jeffrey B. Johnson, Charles W. Koburger III, Jerome B. Lasky, Brian Lloyd, Glen L. Miles, James S. Nakos, Wendell P. Noble Jr., Steven H. Voldman, Michael Armacost, Richard Ferguson: The evolution of IBM CMOS DRAM technology. IBM Journal of Research and Development 39(1-2): 167-188 (1995) |
1 | Eric Adler | [1] |
2 | Jeffrey J. Brown | [2] |
3 | John K. DeBrosse | [1] |
4 | Richard Ferguson | [1] |
5 | Stephen F. Geissler | [1] |
6 | Alois Gutmann | [2] |
7 | Martin Gutsche | [2] |
8 | Scott D. Halle | [2] |
9 | Peter D. Hoh | [2] |
10 | Steven J. Holmes | [1] |
11 | Mark D. Jaffe | [1] |
12 | Jeffrey B. Johnson | [1] |
13 | George A. Kaplita | [2] |
14 | John H. Keller | [2] |
15 | Charles W. Koburger III | [1] |
16 | Jerome B. Lasky | [1] |
17 | Brian Lloyd | [1] |
18 | Glen L. Miles | [1] |
19 | K. Paul Muller | [2] |
20 | Munir D. Naeem | [2] |
21 | James S. Nakos | [1] |
22 | Hung Y. Ng | [2] |
23 | Wendell P. Noble Jr. | [1] |
24 | Bruno Spuler | [2] |
25 | Senthil Srinivasan | [2] |
26 | Steven H. Voldman | [1] |
27 | Richard Wise | [2] |
28 | Wendy Yan | [2] |