Scott D. Halle

1999
1	EE	Michael Armacost, Peter D. Hoh, Richard Wise, Wendy Yan, Jeffrey J. Brown, John H. Keller, George A. Kaplita, Scott D. Halle, K. Paul Muller, Munir D. Naeem, Senthil Srinivasan, Hung Y. Ng, Martin Gutsche, Alois Gutmann, Bruno Spuler: Plasma-etching processes for ULSI semiconductor circuits. IBM Journal of Research and Development 43(1): 39-72 (1999)

Coauthor Index

1	Michael Armacost	[1]
2	Jeffrey J. Brown	[1]
3	Alois Gutmann	[1]
4	Martin Gutsche	[1]
5	Peter D. Hoh	[1]
6	George A. Kaplita	[1]
7	John H. Keller	[1]
8	K. Paul Muller	[1]
9	Munir D. Naeem	[1]
10	Hung Y. Ng	[1]
11	Bruno Spuler	[1]
12	Senthil Srinivasan	[1]
13	Richard Wise	[1]
14	Wendy Yan	[1]