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Scott D. Halle

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1999
1EEMichael Armacost, Peter D. Hoh, Richard Wise, Wendy Yan, Jeffrey J. Brown, John H. Keller, George A. Kaplita, Scott D. Halle, K. Paul Muller, Munir D. Naeem, Senthil Srinivasan, Hung Y. Ng, Martin Gutsche, Alois Gutmann, Bruno Spuler: Plasma-etching processes for ULSI semiconductor circuits. IBM Journal of Research and Development 43(1): 39-72 (1999)

Coauthor Index

1Michael Armacost [1]
2Jeffrey J. Brown [1]
3Alois Gutmann [1]
4Martin Gutsche [1]
5Peter D. Hoh [1]
6George A. Kaplita [1]
7John H. Keller [1]
8K. Paul Muller [1]
9Munir D. Naeem [1]
10Hung Y. Ng [1]
11Bruno Spuler [1]
12Senthil Srinivasan [1]
13Richard Wise [1]
14Wendy Yan [1]

Copyright © Sun May 17 03:24:02 2009 by Michael Ley (ley@uni-trier.de)