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Edward W. Scheckler

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1994
4EEEdward W. Scheckler, Andrew R. Neureuther: Models and algorithms for three-dimensional topography simulation with SAMPLE-3D. IEEE Trans. on CAD of Integrated Circuits and Systems 13(2): 219-230 (1994)
3EEKenny K. H. Toh, Andrew R. Neureuther, Edward W. Scheckler: Algorithms for simulation of three-dimensional etching. IEEE Trans. on CAD of Integrated Circuits and Systems 13(5): 616-624 (1994)
1993
2EEEdward W. Scheckler, Nelson N. Tam, Anton K. Pfau, Andrew R. Neureuther: An efficient volume-removal algorithm for practical three-dimensional lithography simulation with experimental verification. IEEE Trans. on CAD of Integrated Circuits and Systems 12(9): 1345-1356 (1993)
1992
1EEEdward W. Scheckler, Alexander S. Wong, Robert K. Wang, Goodwin R. Chin, John R. Camagna, Andrew R. Neureuther, Robert W. Dutton: A utility-based integrated system for process simulation. IEEE Trans. on CAD of Integrated Circuits and Systems 11(7): 911-920 (1992)

Coauthor Index

1John R. Camagna [1]
2Goodwin R. Chin [1]
3Robert W. Dutton [1]
4Andrew R. Neureuther [1] [2] [3] [4]
5Anton K. Pfau [2]
6Nelson N. Tam [2]
7Kenny K. H. Toh [3]
8Robert K. Wang [1]
9Alexander S. Wong [1]

Copyright © Sun May 17 03:24:02 2009 by Michael Ley (ley@uni-trier.de)