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| 1993 | ||
|---|---|---|
| 1 | EE | Edward W. Scheckler, Nelson N. Tam, Anton K. Pfau, Andrew R. Neureuther: An efficient volume-removal algorithm for practical three-dimensional lithography simulation with experimental verification. IEEE Trans. on CAD of Integrated Circuits and Systems 12(9): 1345-1356 (1993) |
| 1 | Andrew R. Neureuther | [1] |
| 2 | Anton K. Pfau | [1] |
| 3 | Edward W. Scheckler | [1] |