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Kenny K. H. Toh

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1994
1EEKenny K. H. Toh, Andrew R. Neureuther, Edward W. Scheckler: Algorithms for simulation of three-dimensional etching. IEEE Trans. on CAD of Integrated Circuits and Systems 13(5): 616-624 (1994)

Coauthor Index

1Andrew R. Neureuther [1]
2Edward W. Scheckler [1]

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