1994 | ||
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1 | EE | Kenny K. H. Toh, Andrew R. Neureuther, Edward W. Scheckler: Algorithms for simulation of three-dimensional etching. IEEE Trans. on CAD of Integrated Circuits and Systems 13(5): 616-624 (1994) |
1 | Andrew R. Neureuther | [1] |
2 | Edward W. Scheckler | [1] |