M. Ohgo

1987
2	EE	S. Yamamoto, T. Kure, M. Ohgo, Teruo Matsuzawa, S. Tachi, H. Sunami: A Two-Dimensional Etching Profile Simulator: ESPRIT. IEEE Trans. on CAD of Integrated Circuits and Systems 6(3): 417-422 (1987)
1	EE	M. Ohgo, Y. Takano, A. Moniwa, S. Yamamoto, Y. Sakai, H. Masuda, H. Sunami: A Two-Dimensional Integrated Process Simulator: SPIRIT-I. IEEE Trans. on CAD of Integrated Circuits and Systems 6(3): 439-445 (1987)

Coauthor Index

1	T. Kure	[2]
2	H. Masuda	[1]
3	Teruo Matsuzawa	[2]
4	A. Moniwa	[1]
5	Y. Sakai	[1]
6	H. Sunami	[1] [2]
7	S. Tachi	[2]
8	Y. Takano	[1]
9	S. Yamamoto	[1] [2]