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1987 | ||
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2 | EE | S. Yamamoto, T. Kure, M. Ohgo, Teruo Matsuzawa, S. Tachi, H. Sunami: A Two-Dimensional Etching Profile Simulator: ESPRIT. IEEE Trans. on CAD of Integrated Circuits and Systems 6(3): 417-422 (1987) |
1 | EE | M. Ohgo, Y. Takano, A. Moniwa, S. Yamamoto, Y. Sakai, H. Masuda, H. Sunami: A Two-Dimensional Integrated Process Simulator: SPIRIT-I. IEEE Trans. on CAD of Integrated Circuits and Systems 6(3): 439-445 (1987) |
1 | T. Kure | [2] |
2 | H. Masuda | [1] |
3 | Teruo Matsuzawa | [2] |
4 | A. Moniwa | [1] |
5 | Y. Sakai | [1] |
6 | H. Sunami | [1] [2] |
7 | S. Tachi | [2] |
8 | Y. Takano | [1] |
9 | S. Yamamoto | [1] [2] |