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1987 | ||
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1 | EE | S. Yamamoto, T. Kure, M. Ohgo, Teruo Matsuzawa, S. Tachi, H. Sunami: A Two-Dimensional Etching Profile Simulator: ESPRIT. IEEE Trans. on CAD of Integrated Circuits and Systems 6(3): 417-422 (1987) |
1 | Teruo Matsuzawa | [1] |
2 | M. Ohgo | [1] |
3 | H. Sunami | [1] |
4 | S. Tachi | [1] |
5 | S. Yamamoto | [1] |