| |
| 1987 | ||
|---|---|---|
| 1 | EE | S. Yamamoto, T. Kure, M. Ohgo, Teruo Matsuzawa, S. Tachi, H. Sunami: A Two-Dimensional Etching Profile Simulator: ESPRIT. IEEE Trans. on CAD of Integrated Circuits and Systems 6(3): 417-422 (1987) |
| 1 | Teruo Matsuzawa | [1] |
| 2 | M. Ohgo | [1] |
| 3 | H. Sunami | [1] |
| 4 | S. Tachi | [1] |
| 5 | S. Yamamoto | [1] |