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1998 | ||
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2 | EE | Walter Bohmayr, Alexander Burenkov, Jürgen Lorenz, Heiner Ryssel, Siegfried Selberherr: Monte Carlo simulation of silicon amorphization during ion implantation. IEEE Trans. on CAD of Integrated Circuits and Systems 17(12): 1236-1243 (1998) |
1985 | ||
1 | EE | Jürgen Lorenz, Joachim Pelka, Heiner Ryssel, Albert Sachs, Albert Seidl, Milos Svoboda: COMPOSITE -- A Complete Modeling Program of Silicon Technology. IEEE Trans. on CAD of Integrated Circuits and Systems 4(4): 421-430 (1985) |
1 | Walter Bohmayr | [2] |
2 | Alexander Burenkov | [2] |
3 | Joachim Pelka | [1] |
4 | Heiner Ryssel | [1] [2] |
5 | Albert Sachs | [1] |
6 | Albert Seidl | [1] |
7 | Siegfried Selberherr | [2] |
8 | Milos Svoboda | [1] |