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| 1988 | ||
|---|---|---|
| 2 | EE | Joachim Pelka, K. P. Muller, Hermann Mader: Simulation of dry etch processes by COMPOSITE. IEEE Trans. on CAD of Integrated Circuits and Systems 7(2): 154-159 (1988) |
| 1985 | ||
| 1 | EE | Jürgen Lorenz, Joachim Pelka, Heiner Ryssel, Albert Sachs, Albert Seidl, Milos Svoboda: COMPOSITE -- A Complete Modeling Program of Silicon Technology. IEEE Trans. on CAD of Integrated Circuits and Systems 4(4): 421-430 (1985) |
| 1 | Jürgen Lorenz | [1] |
| 2 | Hermann Mader | [2] |
| 3 | K. P. Muller | [2] |
| 4 | Heiner Ryssel | [1] |
| 5 | Albert Sachs | [1] |
| 6 | Albert Seidl | [1] |
| 7 | Milos Svoboda | [1] |